Characteristic：
The instrument adopts the non-contact, optical phase shift interferometry measurement does not damage the surface of the workpiece, the three-dimensional graphics can be quickly measured various kinds of workpiece surface topography, and calculated results. Suitable for measuring various gauge, optical components surface roughness; groove depth scale, dial; morphology of groove structure of coating thickness and coating boundary grating; magnetic (light) disk, magnetic head surface structure measurement; silicon wafer surface roughness and graphic structure measurement etc..
Because the instrument has high measuring accuracy, non-contact 3D measurement and characteristics, and using the computer control and fast analysis and calculation results, the utility model is suitable for all levels of testing, metrology research unit of industrial and mining enterprises, precision machining workshop, also applies to institutions of higher learning and scientific research units.
The main technical parameters
Rough surface micro depth measuring range
In a continuous surface, no more than two pixels between adjacent 1 / 4 wavelength: 1000 1nm height mutation
Contains between two adjacent pixels is greater than 1 / 4 wavelength: 130 1nm height mutation
The repeatability of measurement: Ra = 0.5nm
Magnification: 40X
Numerical aperture: 65
Working distance: 0.5mm
Visual instrument field: 0.25mm
Camera: 0.13 * 0.13MM
Visual magnification: 500 x
Camera (computer screen observation) a 2500 *
The receiver array measurement: 1000X1000
Pixel size: 5.2 x 5.2 M
The measurement time sampling (scanning) time: 1S
The mirror reflectivity instrument (high): ~ 50%
The reflectivity (low): ~ 4%
Lighting source: 6V incandescent lamp 5W
Green wavelength: lambda = 530nm interference filter
The half width is 10nm.
The main microscope lift: 110 mm
Working procedure: 5 "mm
The moving range of X, Y direction: ~ 10 mm
Worktable rotation range of motion: 360 degrees
Table inclined range: - 6 DEG
Computer system: P4, more than 2.8G, more than 1G of memory 17 inch flat screen display